EP0373550A2 - Spectromètre de masse à temps de vol à résolution et transmission élevées - Google Patents

Spectromètre de masse à temps de vol à résolution et transmission élevées Download PDF

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Publication number
EP0373550A2
EP0373550A2 EP89122805A EP89122805A EP0373550A2 EP 0373550 A2 EP0373550 A2 EP 0373550A2 EP 89122805 A EP89122805 A EP 89122805A EP 89122805 A EP89122805 A EP 89122805A EP 0373550 A2 EP0373550 A2 EP 0373550A2
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EP
European Patent Office
Prior art keywords
marked
spectrometer according
ion source
focusing
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP89122805A
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German (de)
English (en)
Other versions
EP0373550A3 (fr
Inventor
Paul Dr. Bechthold
Matija Dr. Mihelcic
Kurt Wingerath
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
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Forschungszentrum Juelich GmbH
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Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH
Publication of EP0373550A2 publication Critical patent/EP0373550A2/fr
Publication of EP0373550A3 publication Critical patent/EP0373550A3/fr
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers
    • H01J49/403—Time-of-flight spectrometers characterised by the acceleration optics and/or the extraction fields

Definitions

  • the invention relates to time-of-flight (mass) spectrometers with an ion source generating a pulsed ion beam and potential-shaping devices, possibly a reflector with speed focusing by beam reversal and a detector.
  • the flight time (mass) spectrometry offers the essential advantage of being able to observe ions of a very large mass range simultaneously. For this reason, it has recently been used frequently in the mass analysis of cluster beams and the analysis of fragments of large organic molecules. An analysis of particles that are emitted during combustion processes also appears possible. In these areas of application, the low density of the particles to be analyzed is problematic and must be taken into account in addition to the resolution.
  • mass spectrometers of the type mentioned at the beginning usually contain wire networks which form potential in the ion source as well as in the reflector and, if appropriate, on the detector. The transmission of the devices is reduced by these and disruptive secondary effects can occur.
  • the aim of the invention is therefore a device with an improved transmission compared to a high one Mass resolution and avoidance of interference effects and high detection sensitivity.
  • the device of the type mentioned at the outset which was developed for this purpose, is characterized by a gridless ion source with a series of at least three preferably parallel hole electrodes with a beam-focusing, space-focusing potential distribution.
  • an ion source which does not have a grating in the direction of flight, but rather a sequence of coaxial perforated electrodes with a programmed potential distribution applied to them, by means of which beam bundling is achieved in such a way that practically all of the ions produced are directed in the beam direction.
  • Parallel perforated electrodes are particularly simple, but can also be wholly or partially conical or spherical shell-like or the like. shaped coaxial electrodes can be provided.
  • each aperture acts like an ion-optical lens.
  • the number of apertures and the applied voltages of the ion-optical system are varied so that they result in a potential distribution which - despite the absence of a grating - causes beam formation with additional spatial focusing, and in particular the chromatic aberration the ion source minimized.
  • the field penetrations are used for beam shaping and beam guidance. It a practically 100% transmission of the ion-optical system can be achieved. This is especially the case with an ionization volume of a few 100 mm3.
  • the number of apertures and the voltages for the electrostatic reflector are determined in a corresponding manner.
  • the necessary potential distribution can be calculated in different ways, such as. B. according to a charge density method (calculation based on the density of the influential charges on the surfaces) or according to a matrix method, however, programming that proves to be particularly expedient is based on a relaxation method, in particular over-relaxation method, while optimizing the electrostatic potential by solving the Laplace's equation declines.
  • the number of parallel electrodes, their hole diameter, distance and the voltages to be applied are included as variables.
  • a very large ionization volume is permitted (for example 0.1-1 cm 3), so that an evaluable signal still results at the detector even with a very low particle density.
  • a programmed axis potential distribution with at least two local extreme values in the axis direction is particularly expedient within the scope of the invention, which results in a minimization of the chromatic aberration simultaneously with the spatial focusing (compensation of the time-of-flight differences resulting from the finite ionization volume), which occurs in conventional Devices with the help of ion-optical grids (with reduced transmission; see above) is achieved (WC Wiley and IH McLaren, Rev.Sci.Instr. 26 (1955) 1150).
  • the ions are formed in the ion source in particular by laser-pulsed ion generation.
  • FIG. 1 shows the shape of the ion packet of a mass (of, for example, 560 amu) in time increments of 500 ns.
  • a pulsed ion beam generated in the ion source (originating from an injected neutral particle beam, surface sputtering or the like) is spatially created by a sequence of electrodes 2 and concentrated in time and reaches the reflector 3 (for which an optimization example is shown in FIG. 4), which likewise has a sequence of electrodes and in which speed differences are compensated for by reversing the direction, so that ions with the same z / m arrive at the detector 4 at the same time.
  • such a spectrometer can also be operated for special examinations without a reflector, which, however, is usually provided and is then preferably also equipped with a series of perforated electrodes in the context of the present invention.
  • both the ion source and the reflector usually contain potential-forming wire networks and often a further network is also provided on the detector.
  • such networks are now completely dispensed with, thus achieving both improved transmission and suppression of disruptive secondary effects.
  • the field penetrations that arise on the electrodes are used for beam guidance and beam shaping by taking this into account bearing programmed potential distribution is provided on the electrodes 2, such as. B. is shown in Figure 2 and / or an electrode shape adapted to the desired optimization is provided, as indicated in Figure 3.
  • the detector is biased slightly negatively in particular with respect to the flight tube in order to keep secondary electrons away.
  • the detector is preferably a channel plate detector with adjustment means for setting up the position of the detector incident surface and its angle relative to the beam.
  • the ion sources shown in FIGS. 1 to 3 each have 15 hole electrodes which, for the sake of simplicity, are shaped essentially the same (FIGS. 1 and 2) or can also have a different hole diameter (FIG. 3).
  • (at least) two electrodes upstream of the ionization site and located at the same potential are preferably provided as repeller electrodes (see FIG. 2), which serve to homogenize the potential at the ionization site.
  • the number of electrodes in an ion source is variable. At least three electrodes are provided. There is expediently a series of 8 to 20 perforated electrodes which are arranged essentially at the same distance from one another, but can also have different distances, which must then be taken into account in the voltages to be applied.
  • FIG. 5 A comparison of Figures a and b of Figure 5 shows the effect of a rotatable and movable adjusted channel plate detector, through its adjustment an optimization of the resolution and sensitivity is additionally achieved.
  • the channel plate (s) is or are only indicated schematically.
  • the hatched area only indicates the position of the plate (s).
  • FIG. 6 The result of an ion cluster investigation of iron cluster ions is shown in FIG. 6, from which the excellent mass resolution can be seen. According to the invention, a resolution m / ⁇ m of a few thousand is achieved with practically 100% transmission.
EP19890122805 1988-12-14 1989-12-11 Spectromètre de masse à temps de vol à résolution et transmission élevées Withdrawn EP0373550A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3842044A DE3842044A1 (de) 1988-12-14 1988-12-14 Flugzeit(massen)spektrometer mit hoher aufloesung und transmission
DE3842044 1988-12-14

Publications (2)

Publication Number Publication Date
EP0373550A2 true EP0373550A2 (fr) 1990-06-20
EP0373550A3 EP0373550A3 (fr) 1991-05-22

Family

ID=6369123

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19890122805 Withdrawn EP0373550A3 (fr) 1988-12-14 1989-12-11 Spectromètre de masse à temps de vol à résolution et transmission élevées

Country Status (3)

Country Link
US (1) US5065018A (fr)
EP (1) EP0373550A3 (fr)
DE (1) DE3842044A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2355129A1 (fr) * 2010-01-29 2011-08-10 Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH Reflecteur pour un spectromètre de masse à temps de vol

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022061A1 (de) * 1990-07-11 1992-01-16 Wollnik Hermann Analysenvorrichtung mit elektrothermischem atomisator und massenspektrometer zur atom- und molekuelanalyse
US5168158A (en) * 1991-03-29 1992-12-01 The United States Of America As Represented By The United States Department Of Energy Linear electric field mass spectrometry
US5202563A (en) * 1991-05-16 1993-04-13 The Johns Hopkins University Tandem time-of-flight mass spectrometer
US5272338A (en) * 1992-05-21 1993-12-21 The Pennsylvania Research Corporation Molecular imaging system
CA2101237C (fr) * 1992-09-11 1999-04-13 Stephen Ward Downey Appareil muni d'un spectrometre de masse
US6002127A (en) 1995-05-19 1999-12-14 Perseptive Biosystems, Inc. Time-of-flight mass spectrometry analysis of biomolecules
US5625184A (en) * 1995-05-19 1997-04-29 Perseptive Biosystems, Inc. Time-of-flight mass spectrometry analysis of biomolecules
DE19547949C2 (de) * 1995-09-19 2000-04-06 Bruker Daltonik Gmbh Flugzeitmassenspektrometer
US5654545A (en) * 1995-09-19 1997-08-05 Bruker-Franzen Analytik Gmbh Mass resolution in time-of-flight mass spectrometers with reflectors
US5742049A (en) * 1995-12-21 1998-04-21 Bruker-Franzen Analytik Gmbh Method of improving mass resolution in time-of-flight mass spectrometry
US5641959A (en) * 1995-12-21 1997-06-24 Bruker-Franzen Analytik Gmbh Method for improved mass resolution with a TOF-LD source
US5847385A (en) * 1996-08-09 1998-12-08 Analytica Of Branford, Inc. Mass resolution by angular alignment of the ion detector conversion surface in time-of-flight mass spectrometers with electrostatic steering deflectors
DE19642261A1 (de) * 1996-10-11 1998-04-16 Hoechst Ag Verfahren und Vorrichtung zum Erkennen der katalytischen Aktivität von Feststoffen
US6037586A (en) * 1998-06-18 2000-03-14 Universite Laval Apparatus and method for separating pulsed ions by mass as said pulsed ions are guided along a course
DE10005698B4 (de) * 2000-02-09 2007-03-01 Bruker Daltonik Gmbh Gitterloses Reflektor-Flugzeitmassenspektrometer für orthogonalen Ioneneinschuss
AU2001263385B2 (en) * 2000-05-12 2004-12-02 The Johns Hopkins University Microchannel plate detector assembly for a time-of-flight mass spectrometer
EP1281192B1 (fr) * 2000-05-12 2005-08-03 The Johns Hopkins University Dispositif d'extraction d'ions a concentration, sans grille, pour spectrometre de masse a temps de vol
AU6338501A (en) * 2000-05-26 2001-12-11 Univ Johns Hopkins Microchannel plate detector assembly for a time-of-flight mass spectrometer
GB0100862D0 (en) * 2001-01-11 2001-02-21 Scient Analysis Instr Ltd Reflactron
DE10156604A1 (de) * 2001-11-17 2003-05-28 Bruker Daltonik Gmbh Raumwinkelfokussierender Reflektor für Flugzeitmassenspektrometer
WO2011127091A1 (fr) 2010-04-05 2011-10-13 Indiana University Research And Technology Corporation Procédé d'amélioration de la résolution en masse sur une gamme de masses limitée pour la spectrométrie à temps de vol
GB201118270D0 (en) 2011-10-21 2011-12-07 Shimadzu Corp TOF mass analyser with improved resolving power
CN103871830A (zh) * 2012-12-12 2014-06-18 中国科学院大连化学物理研究所 一种缩短离子回头峰时间的飞行时间质谱
CN113758990A (zh) * 2021-08-30 2021-12-07 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) 一种用于团簇束流综合沉积的反射式tof装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3423394A1 (de) * 1983-11-30 1985-06-05 Shimadzu Corp., Kyoto Laufzeit-massenspektrometer
JPS60121662A (ja) * 1983-12-02 1985-06-29 Murata Mfg Co Ltd 質量分析装置
WO1986004732A1 (fr) * 1985-01-30 1986-08-14 Hughes Aircraft Company Systeme de collecte et de transport d'ions secondaires pour microsonde a ions
EP0208894A2 (fr) * 1985-07-10 1987-01-21 Bruker Analytische Messtechnik GmbH Spectromètre de masses à temps de vol avec Un réflecteur d'ions
WO1988006060A1 (fr) * 1987-02-13 1988-08-25 Arch Development Corp. Spectrometre a photo-ions

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3992632A (en) * 1973-08-27 1976-11-16 Hewlett-Packard Company Multiconfiguration ionization source
GB1488657A (en) * 1973-09-24 1977-10-12 Ion Tech Ltd Ion sources
US4072862A (en) * 1975-07-22 1978-02-07 Mamyrin Boris Alexandrovich Time-of-flight mass spectrometer
DE2540505A1 (de) * 1975-09-11 1977-03-24 Leybold Heraeus Gmbh & Co Kg Flugzeit-massenspektrometer fuer ionen mit unterschiedlichen energien
DE2844002A1 (de) * 1978-10-09 1980-05-14 Leybold Heraeus Gmbh & Co Kg Verfahren und vorrichtung zur analyse von fluiden
FR2560434B1 (fr) * 1984-02-29 1987-09-11 Centre Nat Rech Scient Spectrometre de masse a temps de vol
US4933551A (en) * 1989-06-05 1990-06-12 The United State Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Reversal electron attachment ionizer for detection of trace species

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3423394A1 (de) * 1983-11-30 1985-06-05 Shimadzu Corp., Kyoto Laufzeit-massenspektrometer
JPS60121662A (ja) * 1983-12-02 1985-06-29 Murata Mfg Co Ltd 質量分析装置
WO1986004732A1 (fr) * 1985-01-30 1986-08-14 Hughes Aircraft Company Systeme de collecte et de transport d'ions secondaires pour microsonde a ions
EP0208894A2 (fr) * 1985-07-10 1987-01-21 Bruker Analytische Messtechnik GmbH Spectromètre de masses à temps de vol avec Un réflecteur d'ions
WO1988006060A1 (fr) * 1987-02-13 1988-08-25 Arch Development Corp. Spectrometre a photo-ions

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 9, no. 277 (E-355)(2000) 06 November 1985, & JP-A-60 121662 (MURATA SEISAKUSHO K K) 29 Juni 1985, *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2355129A1 (fr) * 2010-01-29 2011-08-10 Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH Reflecteur pour un spectromètre de masse à temps de vol
US8314381B2 (en) 2010-01-29 2012-11-20 Helmholtz-Zentrum Geesthacht Zentrum für Material-und Küstenforschung GmbH Reflector for a time-of-flight mass spectrometer

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Publication number Publication date
DE3842044A1 (de) 1990-06-21
US5065018A (en) 1991-11-12
EP0373550A3 (fr) 1991-05-22

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